GaN på Sapphire HEMT Wafer

GaN på Sapphire HEMT Wafer

Ganwafer offers GaN on Sapphire wafers with HEMT structure and GaN template on Sapphire substrate for power or RF devices. The epitaxial layers of GaN based materials and devices are mainly grown on sapphire substrates. Why epitaxial GaN growth on Sapphire? Reasons are that sapphire substrate has many advantages: firstly, sapphire substrate has mature production technology and good device quality; secondly, sapphire has good stability and can be used in high temperature growth process; finally, sapphire has high mechanical strength and is easy to handle and clean. Therefore, most of the GaN HEMT wafer processes are based on sapphire. However, using sapphire as substrate also has some problems, such as lattice mismatch and thermal stress mismatch, which will produce a large number of defects in the GaN / Sapphire epitaxial layer and cause difficulties in the subsequent device processing.

Och se nu nedan GaN-on-Sapphire HEMT wafer-specifikationer:

Beskrivning

1. GaN på Sapphire Wafer med HEMT-struktur för krafttillämpning

Wafer storlek 2", 3", 4", 6"
AlGaN / GaN HEMT struktur hänvisa 1,2
Bärardensitet 6E12~2E13 cm2
Hallrörlighet /
XRD(102)FWHM ~båge.sek
XRD(002)FWHM ~båge.sek
Arkresistivitet /
AFM RMS (nm) på 5x5um2 <0,25 nm
Bow(um) <=35um
Edge uteslutning <2 mm
SiN passiveringsskikt 0~30nm
Al sammansättning 20-30 %
I komposition 17 % för InAlN
GaN lock /
AlGaN/(In)AlN-barriär /
AlN mellanskikt /
GaN-kanal /
C-dopad GaN-buffert /
Nakenbild /
Underlagsmaterial safirsubstrat

 

2. GaN HEMT-struktur på safirsubstrat för RF-applikation

Wafer storlek 2", 3", 4", 6"
AlGaN / GaN HEMT struktur hänvisa 1,2
Bärardensitet 6E12~2E13 cm2
Hallrörlighet /
XRD(102)FWHM /
XRD(002)FWHM /
Arkresistivitet /
AFM RMS (nm) på 5x5um2 <0,25 nm
Bow(um) <=35um
Edge uteslutning <2 mm
siN passiveringsskikt 0~30nm
u-GaN locklager /
Al sammansättning 20-30 %
I komposition 17 % för InAlN
AlGaN barriärskikt 20~30nm
AlN spacer /
GaN-buffertlager(um) /
GaN-kanal /
Fe-dopad GaN-buffert /
Nakenbild /
Underlagsmaterial safirsubstrat

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