GaN on Sapphire HEMT Wafer

GaN on Sapphire HEMT Wafer

PAM-XIAMEN offers GaN on Sapphire wafers with HEMT structure and GaN template on Sapphire substrate for power or RF devices. The epitaxial layers of GaN based materials and devices are mainly grown on sapphire substrates. Why epitaxial GaN growth on Sapphire? Reasons are that sapphire substrate has many advantages: firstly, sapphire substrate has mature production technology and good device quality; secondly, sapphire has good stability and can be used in high temperature growth process; finally, sapphire has high mechanical strength and is easy to handle and clean. Therefore, most of the GaN HEMT wafer processes are based on sapphire. However, using sapphire as substrate also has some problems, such as lattice mismatch and thermal stress mismatch, which will produce a large number of defects in the GaN / Sapphire epitaxial layer and cause difficulties in the subsequent device processing.

And now please see below GaN-on-Sapphire HEMT wafer specifications:

Description

1. GaN on Sapphire Wafer with HEMT Structure for Power Application

Wafer size 2”, 3”, 4”, 6”
AlGaN/GaN HEMT structure Refer 1.2
Carrier density 6E12~2E13 cm2
Hall mobility /
XRD(102)FWHM ~arc.sec
XRD(002)FWHM ~arc.sec
Sheet Resistivity /
AFM RMS (nm)of 5x5um2 <0.25nm
Bow(um) <=35um
Edge exclusion <2mm
SiN passivation layer 0~30nm
Al composition 20-30%
In composition 17% for InAlN
GaN cap /
AlGaN/(In)AlN barrier /
AlN interlayer /
GaN channel /
C doped GaN buffer /
Nudeation /
Substrate material Sapphire substrate

 

2. GaN HEMT Structure on Sapphire Substrate for RF Application

Wafer size 2”, 3”, 4”, 6”
AlGaN/GaN HEMT structure Refer 1.2
Carrier density 6E12~2E13 cm2
Hall mobility /
XRD(102)FWHM /
XRD(002)FWHM /
Sheet Resistivity /
AFM RMS (nm)of 5x5um2 <0.25nm
Bow(um) <=35um
Edge exclusion <2mm
siN passivation layer 0~30nm
u-GaN cap layer /
Al composition 20-30%
In composition 17% for InAlN
AlGaN barrier layer 20~30nm
AlN spacer /
GaN buffer layer(um) /
GaN channel /
Fe doped GaN buffer /
Nudeation /
Substrate material Sapphire substrate

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